Items where Author is "Aguinsky, Luiz Felipe"
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Aguinsky, Luiz Felipe and Wachter, Georg and Manstetten, Paul and Rodrigues, Frâncio and Trupke, Michael and Schmid, Ulrich and Hössinger, Andreas and Weinbub, Josef (2021) Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators. Journal of Micromechanics and Microengineering, 31 (12). p. 125003. ISSN 0960-1317