Items where Author is "Manstetten, Paul"

[up] Up a level
Group by: Item Type | No Grouping
Jump to: Article
Number of items: 1.

Article

Aguinsky, Luiz Felipe and Wachter, Georg and Manstetten, Paul and Rodrigues, Frâncio and Trupke, Michael and Schmid, Ulrich and Hössinger, Andreas and Weinbub, Josef (2021) Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators. Journal of Micromechanics and Microengineering, 31 (12). p. 125003. ISSN 0960-1317

This list was generated on Thu Nov 6 02:39:57 2025 UTC.