Items where Author is "Sturm, Heinz"

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Fritzsche, Sven and Topolniak, Ievgenia and Weise, Matthias and Sturm, Heinz (2021) Shape deviations of DLW microstructures in dependency of fabrication parameters. Journal of Micromechanics and Microengineering, 31 (12). p. 125002. ISSN 0960-1317

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